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ISBN:9783902823311

4nanopositioning 3MEMS 2actuator and sensor systems 2electrothermal sensor 2feedback 2feedforward 2microsystems 2motion control 2nanosystems 1AFM 1Q control 1amplitude modulation 1atomic force microscopy 1control applications 1displacement sensors 1electro-thermal principles 1electrothermal actuator 1feedback control methods 1microcantilever 1microscopes

3Moheimani, S. O. Reza 2Fleming, Andrew J. 2Moheimani, S. O. R. 1Fairbairn, Matthew W. 1Fowler, A. G. 1Fowler, Anthony G. 1Karvinen, K. S. 1Mohammadi, A. 1Moore, Steven 1Rakotondrabe, Micky 1Yong, Y. K.

Facets

4nanopositioning 3MEMS 2actuator and sensor systems 2electrothermal sensor 2feedback 2feedforward 2microsystems 2motion control 2nanosystems 1AFM 1Q control 1amplitude modulation 1atomic force microscopy 1control applications 1displacement sensors 1electro-thermal principles 1electrothermal actuator 1feedback control methods 1microcantilever 1microscopes

3Moheimani, S. O. Reza 2Fleming, Andrew J. 2Moheimani, S. O. R. 1Fairbairn, Matthew W. 1Fowler, A. G. 1Fowler, Anthony G. 1Karvinen, K. S. 1Mohammadi, A. 1Moore, Steven 1Rakotondrabe, Micky 1Yong, Y. K.

Title
Creator
Date

A new approach to active Q control of an atomic force microscope micro-cantilever operating in tapping mode

- Fairbairn, Matthew W., Moheimani, S. O. Reza

Creator: Fairbairn, Matthew W. , Moheimani, S. O. Reza
Resource Type: conference paper
Date: 2013

Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation

- Fowler, Anthony G., Rakotondrabe, Micky, Moheimani, S. O. Reza

Creator: Fowler, Anthony G. , Rakotondrabe, Micky , Moheimani, S. O. Reza
Resource Type: conference paper
Date: 2013

Control of a MEMS nanopositioner for atomic force microscopy

- Yong, Y. K., Fowler, A. G., Mohammadi, A., Moheimani, S. O. R.

Creator: Yong, Y. K. , Fowler, A. G. , Mohammadi, A. , Moheimani, S. O. R.
Resource Type: conference paper
Date: 2013

MEMS resonator with displacement sensor based on electro-thermal principles

- Moore, Steven, Moheimani, S. O. Reza

Creator: Moore, Steven , Moheimani, S. O. Reza
Resource Type: conference paper
Date: 2013

Modulated-demodulated Q control of an atomic force microscope microcantilever

- Karvinen, K. S., Moheimani, S. O. R.

Creator: Karvinen, K. S. , Moheimani, S. O. R.
Resource Type: conference paper
Date: 2013

Position sensor performance in nanometer resolution feedback systems

- Fleming, Andrew J.

Creator: Fleming, Andrew J.
Resource Type: conference paper
Date: 2013

Time domain resolution of nanopositioning systems

- Fleming, Andrew J.

Creator: Fleming, Andrew J.
Resource Type: conference paper
Date: 2013

1

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